Microelectronics is a fancy global the place many sciences have to collaborate to create nano-objects: we want services in electronics, microelectronics, physics, optics and mechanics additionally crossing into chemistry, electrochemistry, in addition to biology, biochemistry and medication. Chemistry is inquisitive about many fields from fabrics, chemical substances, gases, beverages or salts, the fundamentals of reactions and equilibrium, to the optimized cleansing of surfaces and selective etching of particular layers. additionally, over contemporary a long time, the scale of the transistors has been tremendously lowered whereas the performance of circuits has elevated. This ebook contains 5 chapters protecting the chemical compounds and sequences utilized in processing, from cleansing to etching, the position and effect in their purity, besides the fabrics utilized in “Front finish Of the road” which corresponds to the center and function of person transistors, then relocating directly to the “Back finish Of the road” that is with regards to the interconnection of the entire transistors. eventually, the necessity for particular functionalization additionally calls for key wisdom on floor remedies and chemical administration to permit new applications.
1. Chemistry within the “Front finish of the road” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec.
2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis.
three. The Chemistry of rainy floor training: cleansing, Etching and Drying, Yannick Le Tiec and Martin Knotter.
four. The Use and administration of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti.
five. floor Functionalization for Micro- and Nanosystems: software to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet.
About the Authors
Yannick Le Tiec is a technical professional at CEA-Leti, Minatec on the grounds that 2002. he's a CEA-Leti assignee at IBM, Albany (NY) to improve the complicated 14 nm CMOS node and the FDSOI expertise. He held diversified technical positions from the complex three hundred mm SOI CMOS pilot line to assorted assignments inside of SOITEC for complex wafer improvement and later inside of INES to optimize sunlight cellphone ramp-up and yield. He has been a part of the ITRS entrance finish technical operating staff at ITRS due to the fact that 2008.